Precision
Process has been working closely with customers to improve
wafer-processing efficiency. The new EXP series is designed
with the smallest most efficient layout design in the
industry. The EXP using a 3 axis automated wafer transport
system allows all chemical processes in the rear and
all rinsing in the front. This design results in a footprint
1/2 the length of conventional linear systems, saving
valuable clean room floor space. The EXP transporter
is clean, fast, smooth, and accurate in positioning fragile
wafers. The EXP is available with multiple transporters
as well as linear transporters.
